Laser focus positioning method with submicrometer accuracy

Journal article
(Online publication)

Publication Details

Author(s): Alexeev I, Strauß J, Gröschl AC, Cvecek K, Schmidt M
Journal: Applied Optics
Publisher: Osa Optical Society of America
Publication year: 2013
Volume: 52
Journal issue: 3
Pages range: 415-421
ISSN: 0003-6935
Language: English


Accurate positioning of a sample is one of the primary challenges in laser micromanufacturing. There are a number of methods that allow detection of the surface position; however, only a few of them use the beam of the processing laser as a basis for the measurement. Those methods have an advantage that any changes in the processing laser beam can be inherently accommodated. This work describes a direct, contact-free method to accurately determine workpiece position with respect to the structuring laser beam focal plane based on nonlinear harmonic generation. The method makes workpiece alignment precise and time efficient due to ease of automation and provides the repeatability and accuracy of the surface detection of less than 1 μm.

FAU Authors / FAU Editors

Alexeev, Ilya
Lehrstuhl für Photonische Technologien
Gröschl, Andreas Christian
Lehrstuhl für Fertigungsmesstechnik
Schmidt, Michael Prof. Dr.-Ing.
Lehrstuhl für Photonische Technologien
Strauß, Johannes
Lehrstuhl für Photonische Technologien

Additional Organisation
Erlangen Graduate School in Advanced Optical Technologies

How to cite

Alexeev, I., Strauß, J., Gröschl, A.C., Cvecek, K., & Schmidt, M. (2013). Laser focus positioning method with submicrometer accuracy. Applied Optics, 52(3), 415-421.

Alexeev, Ilya, et al. "Laser focus positioning method with submicrometer accuracy." Applied Optics 52.3 (2013): 415-421.


Last updated on 2018-19-04 at 03:16