Double aberration correction in a low-energy electron microscope

Schmidt T, Marchetto H, Levesque PL, Groh U, Maier F, Preikszas D, Hartel P, Spehr R, Lilienkamp G, Engel W, Fink R, Bauer E, Rose H, Umbach E, Freund HJ (2010)


Publication Type: Journal article, Original article

Publication year: 2010

Journal

Original Authors: Schmidt T., Marchetto H., Levesque P.L., Groh U., Maier F., Preikszas D., Hartel P., Spehr R., Lilienkamp G., Engel W., Fink R., Bauer E., Rose H., Umbach E., Freund H.-J.

Publisher: Elsevier

Book Volume: 110

Pages Range: 1358-1361

Journal Issue: 11

DOI: 10.1016/j.ultramic.2010.07.007

Abstract

The lateral resolution of a surface sensitive low-energy electron microscope (LEEM) has been improved below 4. nm for the first time. This breakthrough has only been possible by simultaneously correcting the unavoidable spherical and chromatic aberrations of the lens system. We present an experimental criterion to quantify the aberration correction and to optimize the electron optical system. The obtained lateral resolution of 2.6. nm in LEEM enables the first surface sensitive, electron microscopic observation of the herringbone reconstruction on the Au(1. 1. 1) surface. © 2010 Elsevier B.V.

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APA:

Schmidt, T., Marchetto, H., Levesque, P.L., Groh, U., Maier, F., Preikszas, D.,... Freund, H.-J. (2010). Double aberration correction in a low-energy electron microscope. Ultramicroscopy, 110(11), 1358-1361. https://dx.doi.org/10.1016/j.ultramic.2010.07.007

MLA:

Schmidt, Th, et al. "Double aberration correction in a low-energy electron microscope." Ultramicroscopy 110.11 (2010): 1358-1361.

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