Focus Alignment Method for Laser Manufacturing at Sub-micron Positional Accuracy

Journal article

Publication Details

Author(s): Strauß J, Cvecek K, Gröschl AC, Alexeev I, Schmidt M
Journal: Physics Procedia
Publisher: Elsevier BV
Publication year: 2012
Volume: 39
Pages range: 800-806
ISSN: 1875-3892
eISSN: 1875-3884
Language: English


Accurate positioning of a sample is one of the major challenges in the laser micro manufacturing – especially if the requirements on tolerances are high as in ultrafast laser micromachining. There are a number of methods that allow detection of the surface position, however only few of them use the beam of the processing laser as a basis for the measurement. These methods have an advantage that any changes in the structuring beam will be inherently accommodated for. This work describes a direct contact free method to accurately determine the surface position with respect to the structuring beam focal plane. The method makes alignment of unique samples precise and time efficient due to ease of automation and provides a reproducibility of surface detection of less than 1 μm.


FAU Authors / FAU Editors

Alexeev, Ilya
Lehrstuhl für Photonische Technologien
Gröschl, Andreas Christian
Lehrstuhl für Fertigungsmesstechnik
Schmidt, Michael Prof. Dr.-Ing.
Lehrstuhl für Photonische Technologien
Strauß, Johannes
Lehrstuhl für Photonische Technologien

Additional Organisation
Erlangen Graduate School in Advanced Optical Technologies

How to cite

Strauß, J., Cvecek, K., Gröschl, A.C., Alexeev, I., & Schmidt, M. (2012). Focus Alignment Method for Laser Manufacturing at Sub-micron Positional Accuracy. Physics Procedia, 39, 800-806.

Strauß, Johannes, et al. "Focus Alignment Method for Laser Manufacturing at Sub-micron Positional Accuracy." Physics Procedia 39 (2012): 800-806.


Last updated on 2018-21-06 at 15:54