Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology

Conference contribution
(Conference Contribution)


Publication Details

Author(s): Sun Z, Hausotte T
Publication year: 2016
Pages range: 159-161
ISBN: 978-3-9816876-0-6
Language: English


FAU Authors / FAU Editors

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik
Sun, Zhongyuan
Lehrstuhl für Fertigungsmesstechnik


How to cite

APA:
Sun, Z., & Hausotte, T. (2016). Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology. (pp. 159-161). Nürnberg, DE.

MLA:
Sun, Zhongyuan, and Tino Hausotte. "Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology." Proceedings of the 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016, Nürnberg 2016. 159-161.

BibTeX: 

Last updated on 2018-19-04 at 03:38