High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles

Beitrag in einer Fachzeitschrift
(Originalarbeit)


Details zur Publikation

Autorinnen und Autoren: Shahmoon A, Strauß J, Zafri H, Schmidt M, Zalevsky Z
Zeitschrift: Physics Procedia
Jahr der Veröffentlichung: 2016
Band: 83
Seitenbereich: 188-193
ISSN: 1875-3892
eISSN: 1875-3884
Sprache: Englisch


Abstract


In this paper we present the fabrication procedure as well as the preliminary experimental results of a novel method for construction of high resolution nanometric interconnection lines. The fabrication procedure relies on a self-assembly process of gold nanoparticles at specific predetermined nanostructures. The nanostructures for the self-assembly process are based on the focused ion beam (FIB) or scanning electron beam (SEM) technology. The assembled nanoparticles are being illuminated using a picosecond laser with a wavelength of 532 nm. Different pulse energies have been investigated. The paper aimed at developing a novel and reliable process for fabrication of interconnection lines encompass three different disciplines, self-assembly of nanometric particles, optics and microelectronic.


FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Schmidt, Michael Prof. Dr.-Ing.
Lehrstuhl für Photonische Technologien
Strauß, Johannes
Lehrstuhl für Photonische Technologien


Zitierweisen

APA:
Shahmoon, A., Strauß, J., Zafri, H., Schmidt, M., & Zalevsky, Z. (2016). High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles. Physics Procedia, 83, 188-193. https://dx.doi.org/10.1016/j.phpro.2016.08.153

MLA:
Shahmoon, Asaf, et al. "High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles." Physics Procedia 83 (2016): 188-193.

BibTeX: 

Zuletzt aktualisiert 2018-17-10 um 21:00