High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles

Journal article
(Original article)


Publication Details

Author(s): Shahmoon A, Strauß J, Zafri H, Schmidt M, Zalevsky Z
Journal: Physics Procedia
Publication year: 2016
Volume: 83
Pages range: 188-193
ISSN: 1875-3892
eISSN: 1875-3884
Language: English


Abstract


In this paper we present the fabrication procedure as well as the preliminary experimental results of a novel method for construction of high resolution nanometric interconnection lines. The fabrication procedure relies on a self-assembly process of gold nanoparticles at specific predetermined nanostructures. The nanostructures for the self-assembly process are based on the focused ion beam (FIB) or scanning electron beam (SEM) technology. The assembled nanoparticles are being illuminated using a picosecond laser with a wavelength of 532 nm. Different pulse energies have been investigated. The paper aimed at developing a novel and reliable process for fabrication of interconnection lines encompass three different disciplines, self-assembly of nanometric particles, optics and microelectronic.


FAU Authors / FAU Editors

Schmidt, Michael Prof. Dr.-Ing.
Lehrstuhl für Photonische Technologien
Strauß, Johannes
Lehrstuhl für Photonische Technologien


How to cite

APA:
Shahmoon, A., Strauß, J., Zafri, H., Schmidt, M., & Zalevsky, Z. (2016). High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles. Physics Procedia, 83, 188-193. https://dx.doi.org/10.1016/j.phpro.2016.08.153

MLA:
Shahmoon, Asaf, et al. "High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles." Physics Procedia 83 (2016): 188-193.

BibTeX: 

Last updated on 2018-21-06 at 15:32