Silicon carbide CVD for electronic device applications

Journal article

Publication Details

Author(s): Wellmann P, Pons M
Journal: Chemical Vapor Deposition
Publisher: Wiley-VCH Verlag
Publication year: 2006
Volume: 12
Journal issue: 8-9
Pages range: 463-464
ISSN: 0948-1907
Language: English

FAU Authors / FAU Editors

Wellmann, Peter Prof. Dr.-Ing.
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)

External institutions with authors

Institut National Polytechnique de Grenoble - Grenoble Institute of Technology

How to cite

Wellmann, P., & Pons, M. (2006). Silicon carbide CVD for electronic device applications. Chemical Vapor Deposition, 12(8-9), 463-464.

Wellmann, Peter, and Michel Pons. "Silicon carbide CVD for electronic device applications." Chemical Vapor Deposition 12.8-9 (2006): 463-464.


Last updated on 2018-08-08 at 13:54