Piezo-Resistive Sensing Active (PRSA) Probes integrated into a Nanomeasuring Machine (NMM-1)

Conference contribution
(Conference Contribution)


Publication Details

Author(s): El Melegy A, Weinert B, Hausotte T, El-Wahed Younes MA, Mohammed Ahmed A
Editor(s): SECTOR
Publication year: 2016
Conference Proceedings Title: Proceedings of the NanoMetrology France 2016
Language: English


FAU Authors / FAU Editors

El Melegy, Ahmed
Lehrstuhl für Fertigungsmesstechnik
Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik
Weinert, Benedict
Lehrstuhl für Fertigungsmesstechnik


How to cite

APA:
El Melegy, A., Weinert, B., Hausotte, T., El-Wahed Younes, M.A., & Mohammed Ahmed, A. (2016). Piezo-Resistive Sensing Active (PRSA) Probes integrated into a Nanomeasuring Machine (NMM-1). In SECTOR (Eds.), Proceedings of the NanoMetrology France 2016. Paris, FR.

MLA:
El Melegy, Ahmed, et al. "Piezo-Resistive Sensing Active (PRSA) Probes integrated into a Nanomeasuring Machine (NMM-1)." Proceedings of the NanoMetrology 2016, Paris Ed. SECTOR, 2016.

BibTeX: 

Last updated on 2018-19-04 at 03:32