Nucleation and growth of polycrystalline SiC

Beitrag in einer Fachzeitschrift


Details zur Publikation

Autorinnen und Autoren: Kaiser M, Schimmel S, Jokubavicius V, Linnarsson MK, Ou H, Syväjärvi M, Wellmann P
Zeitschrift: IOP Conference Series: Materials Science and Engineering
Verlag: Institute of Physics: Open Access Journals / IOP Publishing
Jahr der Veröffentlichung: 2014
Band: 56
ISSN: 1757-8981
eISSN: 1757-899X
Sprache: Englisch


Abstract


The nucleation and bulk growth of polycrystalline SiC in a 2 inch PVT setup using isostatic and pyrolytic graphite as substrates was studied. Textured nucleation occurs under near-thermal equilibrium conditions at the initial growth stage with hexagonal platelet shaped crystallites of 4H, 6H and 15R polytypes. It is found that pyrolytic graphite results in enhanced texturing of the nucleating gas species. Reducing the pressure leads to growth of the crystallites until a closed polycrystalline SiC layer containing voids with a rough surface is developed. Bulk growth was conducted at 35 mbar Ar pressure at 2250 degrees C in diffusion limited mass transport regime generating a convex shaped growth form of the solid-gas interface leading to lateral expansion of virtually [001] oriented crystallites. Growth at 2350 degrees C led to the stabilization of 6H polytypic grains. The micropipe density in the bulk strongly depends on the substrate used.


FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Kaiser, Michl
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)
Schimmel, Saskia
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)
Wellmann, Peter Prof. Dr.-Ing.
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)


Einrichtungen weiterer Autorinnen und Autoren

KTH Royal Institute of Technology
Linköping University
Technical University of Denmark / Danmarks Tekniske Universitet (DTU)


Zitierweisen

APA:
Kaiser, M., Schimmel, S., Jokubavicius, V., Linnarsson, M.K., Ou, H., Syväjärvi, M., & Wellmann, P. (2014). Nucleation and growth of polycrystalline SiC. IOP Conference Series: Materials Science and Engineering, 56. https://dx.doi.org/10.1088/1757-899X/56/1/012001

MLA:
Kaiser, Michl, et al. "Nucleation and growth of polycrystalline SiC." IOP Conference Series: Materials Science and Engineering 56 (2014).

BibTeX: 

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