Absorption measurements and doping level evaluation in n-type and p-type 4H-SiC and 6H-SiC

Weingärtner R, Bickermann M, Hofmann HD, Rasp M, Straubinger T, Wellmann P, Winnacker A (2001)


Publication Language: English

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2001

Journal

Publisher: Trans Tech Publications

City/Town: Switzerland

Book Volume: 353-356

Pages Range: 397-400

Conference Proceedings Title: Materials Science Forum (Volumes 353-356)

Event location: Klöoster Banz DE

DOI: 10.4028/www.scientific.net/MSF.353-356.397

Abstract

An optical characterization method based on the fundamental absorption bands in SiC is presented for determination of the spatial distribution of doping level concentration in n-type 4H- and 6H-SiC and p-type (Al, B) 6H-SiC. Band gap related absorption has been calculated numerically taking into account band filling, band shrinkage and band tailing effects and has been compared with experimental data. In addition, below band gap absorption transitions in n-type 4H-SiC and p-type (B) 6H-SiC at 460nm and 730nm, respectively, have been investigated. Calibration plots correlating these absorption bands with the charge carrier concentration have been determined and the application for mapping of the doping level distribution in SiC wafers will be demonstrated.

Authors with CRIS profile

How to cite

APA:

Weingärtner, R., Bickermann, M., Hofmann, H.-D., Rasp, M., Straubinger, T., Wellmann, P., & Winnacker, A. (2001). Absorption measurements and doping level evaluation in n-type and p-type 4H-SiC and 6H-SiC. Materials Science Forum, 353-356, 397-400. https://dx.doi.org/10.4028/www.scientific.net/MSF.353-356.397

MLA:

Weingärtner, Roland, et al. "Absorption measurements and doping level evaluation in n-type and p-type 4H-SiC and 6H-SiC." Materials Science Forum 353-356 (2001): 397-400.

BibTeX: Download