Influence of dislocation content on the quantitative determination of the doping level distribution in n-GaAs using absorption mapping

Journal article


Publication Details

Author(s): Künecke U, Wellmann P
Journal: European Physical Journal-Applied Physics
Publisher: EDP Sciences
Publication year: 2006
Volume: 34
Journal issue: 3
Pages range: 209-213
ISSN: 1286-0042
Language: English


Abstract


In an earlier paper [ P. J. Wellmann, A. Albrecht, U. Kunecke, B. Birkmann, G. Mueller, M. Jurisch, Eur. Phys. J. Appl. Phys. 27, 357 ( 2004)] an optical method based on whole wafer absorption measurements was presented to determine the charge carrier concentration and its lateral distribution in n-type ( Si/Te) doped GaAs. The submitted results for Si-doped GaAs gave rise to questions concerning the interpretation of absorption mappings in wafers with high dislocation densities. GaAs substrates for optoelectronic devices are strongly affected by dislocations. Therefore further studies were conducted: absorption and Hall measurements were performed on GaAs: Si wafers with high and low dislocation densities. Absorption in Si-doped GaAs is far more complex than in Te-doped GaAs. It shows a co-dependency on charge carrier concentration and dislocation content which causes complications in the quantitative optical determination of the charge carrier concentration. Qualitatively, absorption mappings depict dislocations and variations of charge carrier concentration very well.



FAU Authors / FAU Editors

Künecke, Ulrike Dr.-Ing.
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)
Wellmann, Peter Prof. Dr.-Ing.
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)


How to cite

APA:
Künecke, U., & Wellmann, P. (2006). Influence of dislocation content on the quantitative determination of the doping level distribution in n-GaAs using absorption mapping. European Physical Journal-Applied Physics, 34(3), 209-213. https://dx.doi.org/10.1051/epjap:2006055

MLA:
Künecke, Ulrike, and Peter Wellmann. "Influence of dislocation content on the quantitative determination of the doping level distribution in n-GaAs using absorption mapping." European Physical Journal-Applied Physics 34.3 (2006): 209-213.

BibTeX: 

Last updated on 2018-10-08 at 06:38