Lindlein N, Quabis S, Peschel U, Leuchs G (2007)
Publication Type: Journal article
Publication year: 2007
Publisher: Optical Society of America
Book Volume: 15
Pages Range: 5827-5842
Journal Issue: 9
DOI: 10.1364/OE.15.005827
The modulation transfer function (MTF) is calculated for imaging with linearly, circularly and radially polarized light as well as for different numerical apertures and aperture shapes. Special detectors are only sensitive to one component of the electric energy density, e.g. the longitudinal component. For certain parameters this has advantages concerning the resolution when comparing to polarization insensitive detectors. It is also shown that in the latter case zeros of the MTF may appear which are purely due to polarization effects and which depend on the aperture angle. Finally some ideas are presented how to use these results for improving the resolution in lithography. © 2007 Optical Society of America.
APA:
Lindlein, N., Quabis, S., Peschel, U., & Leuchs, G. (2007). High numerical aperture imaging with different polarization patterns. Optics Express, 15(9), 5827-5842. https://doi.org/10.1364/OE.15.005827
MLA:
Lindlein, Norbert, et al. "High numerical aperture imaging with different polarization patterns." Optics Express 15.9 (2007): 5827-5842.
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