Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant

Journal article


Publication Details

Author(s): Schwarz S, Rosiwal S, Frank M, Breidt D, Singer R
Journal: Diamond and Related Materials
Publisher: Elsevier
Publication year: 2002
Journal issue: 11
Pages range: 589-595
ISSN: 0925-9635
Language: English


Abstract


The pressure dependence of the growth rate, quality and morphology of CVD-diamond films in an industrial hot-filament plant (CC800D) were investigated by SEM and Raman. Additionally, the concentration of atomic hydrogen near the filament was determined via a calorimetric measurement method. At a substrate temperature of 850 °C the smallest growth rate (0.1 μm/h) and the best quality of diamond coatings were obtained at the pressure with the highest hydrogen concentration (20 mbar). The growth rate increases strongly with decreasing pressure and achieves the maximum value of 0.7 μm/h at 3 mbar. At the same time the diamond coating quality decrease. © 2002 Elsevier Science B.V. All rights reserved.



FAU Authors / FAU Editors

Rosiwal, Stefan PD Dr.-Ing.
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)
Singer, Robert Prof. Dr.-Ing.
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)


How to cite

APA:
Schwarz, S., Rosiwal, S., Frank, M., Breidt, D., & Singer, R. (2002). Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant. Diamond and Related Materials, 11, 589-595. https://dx.doi.org/10.1016/S0925-9635(01)00702-6

MLA:
Schwarz, Sergej, et al. "Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant." Diamond and Related Materials 11 (2002): 589-595.

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Last updated on 2018-08-09 at 07:09