Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation

Journal article


Publication Details

Author(s): Rapp S, Heinrich G, Wollgarten M, Huber HP, Schmidt M
Journal: Journal of Applied Physics
Publisher: American Institute of Physics (AIP)
Publication year: 2015
Volume: 117
Journal issue: 10
Pages range: 105304
ISSN: 0021-8979


FAU Authors / FAU Editors

Schmidt, Michael Prof. Dr.-Ing.
Lehrstuhl für Photonische Technologien


How to cite

APA:
Rapp, S., Heinrich, G., Wollgarten, M., Huber, H.P., & Schmidt, M. (2015). Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation. Journal of Applied Physics, 117(10), 105304. https://dx.doi.org/10.1063/1.4914457

MLA:
Rapp, S., et al. "Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation." Journal of Applied Physics 117.10 (2015): 105304.

BibTeX: 

Last updated on 2018-10-08 at 07:38