Ion Sputtering at Grazing Incidence for SIMS-Analysis

Ryssel H, Ullrich M, Burenkov A (2005)


Publication Type: Journal article

Publication year: 2005

Journal

Book Volume: 228

Pages Range: 373-377

Journal Issue: 1-4

DOI: 10.1016/j.nimb.2004.10.073

Abstract

The angular distributions of sputtered atoms at large angle oblique and grazing incidence of the primary ion beam in SIMS-analysis have been simulated. They exhibit distinct arc-like areas of an enhanced sputtering yield in the spherical angular distributions, especially at grazing incidence angles of about 80° from the normal. These arc-like maxima are formed by particles knocked-out from the target as a result of single collisions between primary ions and target atoms. A possibility to use sputtered particles taken only from angles around those arc-like maxima in the angular distribution of sputtered particles for SIMS-analysis and the depth-resolution of the SIMS-analysis for different sputtering conditions was investigated by means of Monte-Carlo simulations. © 2004 Elsevier B.V. All rights reserved.

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How to cite

APA:

Ryssel, H., Ullrich, M., & Burenkov, A. (2005). Ion Sputtering at Grazing Incidence for SIMS-Analysis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 228(1-4), 373-377. https://dx.doi.org/10.1016/j.nimb.2004.10.073

MLA:

Ryssel, Heiner, M. Ullrich, and Alexander Burenkov. "Ion Sputtering at Grazing Incidence for SIMS-Analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 228.1-4 (2005): 373-377.

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