Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Hofmann N (2010)
Publication Status: Published
Publication Type: Journal article
Publication year: 2010
Publisher: Elsevier
Book Volume: 43
Pages Range: 1099-1105
DOI: 10.1016/j.measurement.2010.04.008
Single beam-, double beam- and triple beam-interferometers built in the NPM-Machine for six degrees of freedom measurements are described. (C) 2010 Elsevier Ltd. All rights reserved.
APA:
Jäger, G., Hausotte, T., Manske, E., Büchner, H.-J., Mastylo, R., Vorbringer-Dorozhovets, N., & Hofmann, N. (2010). Nanomeasuring and nanopositioning engineering. Measurement, 43, 1099-1105. https://doi.org/10.1016/j.measurement.2010.04.008
MLA:
Jäger, Gerd, et al. "Nanomeasuring and nanopositioning engineering." Measurement 43 (2010): 1099-1105.
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