Characterization of microlenses using a phase-shifting shearing interferometer

Journal article


Publication Details

Author(s): Lindlein N
Journal: Optical Engineering
Publisher: Society of Photo-optical Instrumentation Engineers (SPIE)
Publication year: 1994
Volume: 33
Pages range: 2680-2686
ISSN: 0091-3286


Abstract

A shearing interferometer is proposed for the characterization of microlenses. The optical configuration of the test system enables the measurement of the wave aberrations, the focal length, and the deviations of the lens surface from an ideal sphere. In addition, a quantitative evaluation method is given that enables the calculation of the wave aberrations (e.g., the phase function) from the shearing interferometer data.


FAU Authors / FAU Editors

Lindlein, Norbert Prof. Dr.
Lehrstuhl für Experimentalphysik (Optik)

Last updated on 2018-09-08 at 04:54