Thin membranes versus bulk substrates: Investigation of proximity effects in focused electron beam-induced processing

Beitrag in einer Fachzeitschrift


Details zur Publikation

Autorinnen und Autoren: Walz MM, Vollnhals F, Rietzler F, Schirmer M, Kunzmann A, Steinrück HP, Marbach H
Zeitschrift: Journal of Physics D-Applied Physics
Verlag: Institute of Physics: Hybrid Open Access
Jahr der Veröffentlichung: 2012
Band: 45
Heftnummer: 22
ISSN: 0022-3727


Abstract


The resolution of focused electron beam induced processing techniques is limited by electron scattering processes. General wisdom holds that using a membrane, this can be effectively improved due to a cutoff of the electron interaction volume and thus diminished proximity effects. Recently, we demonstrated that in contrast to the expectation, proximity effects can be indeed larger on a 200nm silicon nitride membrane than on the respective bulk substrate, due to charging-induced surface activation. Herein, we expand these investigations on proximity effects in electron beam-induced surface activation to other substrates and to electron beam-induced deposition followed by autocatalytic growth. © 2012 IOP Publishing Ltd.



FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Kunzmann, Andreas
Lehrstuhl für Physikalische Chemie I
Marbach, Hubertus PD Dr.
Lehrstuhl für Physikalische Chemie II
Rietzler, Florian
Lehrstuhl für Physikalische Chemie II
Schirmer, Michael Dr.
Lehrstuhl für Physikalische Chemie II
Steinrück, Hans-Peter Prof. Dr.
Lehrstuhl für Physikalische Chemie II
Vollnhals, Florian Dr.
Lehrstuhl für Physikalische Chemie II
Walz, Marie-Madeleine Dr.
Lehrstuhl für Physikalische Chemie II


Zusätzliche Organisationseinheit(en)
Exzellenz-Cluster Engineering of Advanced Materials


Forschungsbereiche

D Catalytic Materials
Exzellenz-Cluster Engineering of Advanced Materials


Zitierweisen

APA:
Walz, M.-M., Vollnhals, F., Rietzler, F., Schirmer, M., Kunzmann, A., Steinrück, H.-P., & Marbach, H. (2012). Thin membranes versus bulk substrates: Investigation of proximity effects in focused electron beam-induced processing. Journal of Physics D-Applied Physics, 45(22). https://dx.doi.org/10.1088/0022-3727/45/22/225306

MLA:
Walz, Marie-Madeleine, et al. "Thin membranes versus bulk substrates: Investigation of proximity effects in focused electron beam-induced processing." Journal of Physics D-Applied Physics 45.22 (2012).

BibTeX: 

Zuletzt aktualisiert 2019-09-04 um 16:23