Frequency tuning of microwave filter at 60 GHz by laser ablation

Siekiera A, Engelbrecht R, Bauer RH, Rehner R, Schmauß B (2009)

Publication Language: English

Publication Type: Journal article

Publication year: 2009

Journal

Frequenz Walter de Gruyter

Publisher: Walter de Gruyter

Book Volume: 63

Pages Range: 111-115

DOI: 10.1515/FREQ.2009.63.5-6.111

Abstract

The transfer characteristic of microwave filters realized as microstrip circuits is depending on geometrical properties of the structured conducting layers as well as on the material properties of the used substrate. Due to variations of material properties and manufacturing tolerances a certain deviation of target to realized transfer function has to be tolerated. In this article a method for the subsequent tuning of filter characteristics using an excimer laser is presented. By laser ablation of the metal thin film layer, material removal with a minimum size in the range of 5 μm is achieved.

Authors with CRIS profile

Alexander Siekiera Professur für Hochfrequenztechnik mit dem Schwerpunkt Optische Hochfrequenztechnik und Photonik Rainer Engelbrecht Lehrstuhl für Hochfrequenztechnik Bernhard Schmauß Professur für Hochfrequenztechnik mit dem Schwerpunkt Optische Hochfrequenztechnik und Photonik

How to cite

APA:

Siekiera, A., Engelbrecht, R., Bauer, R.H., Rehner, R., & Schmauß, B. (2009). Frequency tuning of microwave filter at 60 GHz by laser ablation. Frequenz, 63, 111-115. https://doi.org/10.1515/FREQ.2009.63.5-6.111

MLA:

Siekiera, Alexander, et al. "Frequency tuning of microwave filter at 60 GHz by laser ablation." Frequenz 63 (2009): 111-115.

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