Precise measurement of large scale surfaces with micro-topographies without overlapping fields of view by white light interferometry

Conference contribution
(Conference Contribution)


Publication Details

Author(s): Wu Y, Sun Z, Hausotte T
Editor(s): L. Blunt & W. Knapp
Publication year: 2017
Conference Proceedings Title: Laser Metrology and Machine Performance XII
Pages range: 144 - 153
ISBN: 978-0-9566790-9-3
Language: English


Abstract


White light interferometry (WLI) is inherently non-contact and is therefore preferably used for sensitive and easily deformable surfaces. WLI allows a fast areal capturing of micro topography with sub-nanometre vertical resolution and lateral resolution in the sub-micrometre range. However the vertical measurement range of most white light interferometer is limited by the range of piezoelectric actuator for the axial scan motion to capture the image stack with a sufficiently small sampling distance. The measurable field is also predetermined through the microscope magnification and the size of the image sensor. For measuring large samples whose lateral dimension exceed the field of view of the WLI, a stitching or fusion of several measurements at adjacent positions is necessary. By integrating a white light interferometer into a nanopositioning and nanomeasuring system (NMM-1) the fields of view can be fused with the help of the high precision position data of the positioning system without the use of stitching algorithms and unique surface structures and features. The NMM-1 features a reliable measurement resolution of less than 0.1 nm and expands the measurement range of the WLI to its whole positioning volume of 25 mm x 25 mm x 5 mm. The metrological characteristics of the integrated WLI are identified for the field of view by utilising an areal calibration set. The orientation of the WLI to the coordinate system of the positioning system was calibrated and the result can be considered in the fusion of measurement data. The detailed identification of measurement noise, flatness deviation, scaling and linearity errors, amplification coefficient, perpendicularity of the axes, and resolution of the measurements along the axis of operation and calibration procedures are discussed in this paper.



FAU Authors / FAU Editors

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik
Sun, Zhongyuan
Lehrstuhl für Fertigungsmesstechnik
Wu, Yiting
Lehrstuhl für Fertigungsmesstechnik


How to cite

APA:
Wu, Y., Sun, Z., & Hausotte, T. (2017). Precise measurement of large scale surfaces with micro-topographies without overlapping fields of view by white light interferometry. In L. Blunt & W. Knapp (Eds.), Laser Metrology and Machine Performance XII (pp. 144 - 153). Wotton-under-Edge, GB.

MLA:
Wu, Yiting, Zhongyuan Sun, and Tino Hausotte. "Precise measurement of large scale surfaces with micro-topographies without overlapping fields of view by white light interferometry." Proceedings of the Laser Metrology and Machine Performance XII, Wotton-under-Edge Ed. L. Blunt & W. Knapp, 2017. 144 - 153.

BibTeX: 

Last updated on 2018-19-04 at 04:13