Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication

Rumler M, Kollmuss M, Baier L, Michel F, Förthner M, Becker M, Rommel M, Frey L (2016)

Publication Status: Published

Publication Type: Conference contribution

Publication year: 2016

Journal

Proceedings of SPIE Society of Photo-optical Instrumentation Engineers (SPIE)

Publisher: SPIE-INT SOC OPTICAL ENGINEERING, PO BOX 10, BELLINGHAM, WA 98227-0010 USA

Book Volume: 10032

DOI: 10.1117/12.2248219

Abstract

This work presents a novel approach for combined micro- and nanofabrication based on the local laser exposure of an UV-curing material through a structured mold. The proposed process makes use of the high freedom of design of direct laser writing (DLW) and the high resolution of soft lithography molds (made e.g. from PDMS). By optimizing the exposure process it was possible to fabricate locally defined hierarchical structures with a height of around 16 um, that are fully covered with nanometer-sized holes using OrmoComp (R). Manual test imprints showed that the fabricated structures can be used for "step & repeat" nanoimprint processes. Furthermore, the local transfer of nanostructures into two different soft lithography resists (Katiobond 110707, mr-NIL210) was investigated. Diffusion of resist components into the PDMS mold was observed and could be prohibited by the use of hybrid molds, which employ OrmoComp as structure containing layer. First experiments revealed successful transfer of the mold's nanostructures into mr-NIL210 but still leave room for improvement concerning the process parameters.

Authors with CRIS profile

Maximilian Rumler Lehrstuhl für Elektronische Bauelemente Michael Förthner Lehrstuhl für Elektronische Bauelemente Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE) NanoWorld Services GmbH DE Germany (DE)

How to cite

APA:

Rumler, M., Kollmuss, M., Baier, L., Michel, F., Förthner, M., Becker, M.,... Frey, L. (2016). Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication. SPIE-INT SOC OPTICAL ENGINEERING, PO BOX 10, BELLINGHAM, WA 98227-0010 USA.

MLA:

Rumler, Maximilian, et al. "Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication." SPIE-INT SOC OPTICAL ENGINEERING, PO BOX 10, BELLINGHAM, WA 98227-0010 USA, 2016.

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