Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine

Hofmann N, Hausotte T, Jäger G, Manske E (2004)

Publication Status: Published

Publication Type: Conference contribution

Publication year: 2004

Journal

VDI-Berichte Deutscher Ingenieur-Verlag

Publisher: Deutscher Ingenieur-Verlag

Book Volume: 1860

Pages Range: 547-553

Abstract

A commercial atomic force microscope (AFM) was integrated into a nanomeasuring and nanopositioning machine (NPM machine) in order to create, a system to measure surface structures with a high resolution over a large area. Different measurement modes were tested and the precision with calibrated standards evaluated. Additional measurements were done with an experimental AFM head consisting of a focus sensor and a cantilever mount.

Authors with CRIS profile

Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

Involved external institutions

Technische Universität Ilmenau DE Germany (DE)

How to cite

APA:

Hofmann, N., Hausotte, T., Jäger, G., & Manske, E. (2004). Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine. (pp. 547-553). Deutscher Ingenieur-Verlag.

MLA:

Hofmann, Norbert, et al. "Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine." Deutscher Ingenieur-Verlag, 2004. 547-553.

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