Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine

Conference contribution


Publication Details

Author(s): Hofmann N, Hausotte T, Jäger G, Manske E
Publisher: Deutscher Ingenieur-Verlag
Publication year: 2004
Volume: 1860
Pages range: 547-553
ISSN: 0083-5560


Abstract

A commercial atomic force microscope (AFM) was integrated into a nanomeasuring and nanopositioning machine (NPM machine) in order to create, a system to measure surface structures with a high resolution over a large area. Different measurement modes were tested and the precision with calibrated standards evaluated. Additional measurements were done with an experimental AFM head consisting of a focus sensor and a cantilever mount.


FAU Authors / FAU Editors

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik


External institutions with authors

Technische Universität Ilmenau


How to cite

APA:
Hofmann, N., Hausotte, T., Jäger, G., & Manske, E. (2004). Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine. (pp. 547-553). Deutscher Ingenieur-Verlag.

MLA:
Hofmann, Norbert, et al. "Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine." Deutscher Ingenieur-Verlag, 2004. 547-553.

BibTeX: 

Last updated on 2018-13-08 at 10:08