A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM

Journal article


Publication Details

Author(s): Romeis S, Paul J, Ziener M, Peukert W
Journal: Review of Scientific Instruments
Publisher: American Institute of Physics (AIP)
Publication year: 2012
Volume: 83
Journal issue: 9
Pages range: 095105
ISSN: 0034-6748
eISSN: 1089-7623
Language: English


Abstract


We report on the development and characterization of a novel in situ manipulation device to perform stressing experiments on the submicron scale inside a high resolution field emission scanning electron microscope. The instrument comprises two main assembly groups: an upper part for positioning and moving a mounted probe and a force sensor as well as a specimen support as lower part. The upper part consists of a closed loop tripod piezoelectric scanner mounted on a self-locking coarse positioning stage. Two interlocked steel springs and a linear variable differential transformer measuring the springs’ deflections compose the lower part of the instrument. This arrangement acts as force-sensor and sample support. In comparison to already well-established concepts a wide measuring range is covered by adjusting the spring constant between 30 N/m and 50000 N/m. Moreover, the new device offers striking advantages with respect to force calibration and sample deformation measurements. Force calibration is performed using the eigenfrequency of the force detection system directly inside the SEM. Deformation data are obtained with high accuracy by simultaneously recording displacements above and below the specimen. The detrimental apparatus compliance is determined, and the influence on measured data subsequently minimized: an easy to validate two-springs-in-series model is used for data correction. A force resolution in normal direction of 100 nN accompanied by a sample deformation resolution of 5 nm can be achieved with the instrument using an appropriate load cell stiffness. The capabilities and versatility of this instrument are exemplified by compression experiments performed on submicron amorphous silica particles.



FAU Authors / FAU Editors

Paul, Jonas
Lehrstuhl für Feststoff- und Grenzflächenverfahrenstechnik
Peukert, Wolfgang Prof. Dr.-Ing.
Lehrstuhl für Feststoff- und Grenzflächenverfahrenstechnik
Romeis, Stefan Dr.-Ing.
Lehrstuhl für Feststoff- und Grenzflächenverfahrenstechnik
Ziener, Marc
Lehrstuhl für Feststoff- und Grenzflächenverfahrenstechnik


Additional Organisation
Exzellenz-Cluster Engineering of Advanced Materials


Research Fields

A1 Functional Particle Systems
Exzellenz-Cluster Engineering of Advanced Materials


How to cite

APA:
Romeis, S., Paul, J., Ziener, M., & Peukert, W. (2012). A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM. Review of Scientific Instruments, 83(9), 095105. https://dx.doi.org/10.1063/1.4749256

MLA:
Romeis, Stefan, et al. "A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM." Review of Scientific Instruments 83.9 (2012): 095105.

BibTeX: 

Last updated on 2019-17-01 at 09:32