Comparison of beam-induced deposition using ion microprobe

Park Y, Nagai T, Takai M, Lehrer C, Frey L, Ryssel H (1999)

Publication Status: Published

Publication Type: Journal article, Review article

Publication year: 1999

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Book Volume: 148

Pages Range: 25-31

URI: https://www.scopus.com/record/display.uri?eid=2-s2.0-0033513926&origin=inward

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Park, Y., Nagai, T., Takai, M., Lehrer, C., Frey, L., & Ryssel, H. (1999). Comparison of beam-induced deposition using ion microprobe. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 148, 25-31.

MLA:

Park, Y., et al. "Comparison of beam-induced deposition using ion microprobe." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 148 (1999): 25-31.

BibTeX: Download