Tailored laser beam shaping for efficient and accurate microstructuring

Journal article
(Original article)


Publication Details

Author(s): Häfner T, Strauß J, Roider C, Heberle J, Schmidt M
Journal: Applied Physics A: Materials Science and Processing
Publication year: 2018
Volume: 124
Journal issue: 111
ISSN: 1432-0630
Language: English


Abstract



Large-area processing with high material removal rates by ultrashort pulsed (USP) lasers is coming into focus by the development of high-power USP laser systems. However, currently the bottleneck for high-rate production is given by slow and inefficient beam manipulation. On the one hand, slow beam deflection with regard to high pulse repetition rates leads to heat accumulation and shielding effects, on the other hand, a conventional focus cannot provide the optimum fluence due to the Gaussian intensity profile. In this paper, we emphasize on two approaches of dynamic laser beam shaping with liquid crystal on silicon spatial light modulation and acousto-optic beam shaping. Advantages and limitations of dynamic laser beam shaping with regard to USP laser material processing and methods for reducing the influence of speckle are discussed. Additionally, the influence of optics induced aberrations on speckle characteristics is evaluated. Laser material processing results are presented correlating the achieved structure quality with the simulated and measured beam quality. Experimental and analytical investigations show a certain fluence dependence of the necessary number of alternative holograms to realize homogeneous microstructures.




FAU Authors / FAU Editors

Häfner, Tom
Lehrstuhl für Photonische Technologien
Heberle, Johannes
Lehrstuhl für Photonische Technologien
Schmidt, Michael Prof. Dr.-Ing.
Lehrstuhl für Photonische Technologien
Strauß, Johannes
Lehrstuhl für Photonische Technologien


Additional Organisation
Erlangen Graduate School in Advanced Optical Technologies
Lehrstuhl für Photonische Technologien


External institutions with authors

Medizinische Universität Innsbruck


How to cite

APA:
Häfner, T., Strauß, J., Roider, C., Heberle, J., & Schmidt, M. (2018). Tailored laser beam shaping for efficient and accurate microstructuring. Applied Physics A: Materials Science and Processing, 124(111). https://dx.doi.org/10.1007/s00339-017-1530-0

MLA:
Häfner, Tom, et al. "Tailored laser beam shaping for efficient and accurate microstructuring." Applied Physics A: Materials Science and Processing 124.111 (2018).

BibTeX: 

Last updated on 2019-01-01 at 23:10