A Synergetic Training Network on Energy beam Processing: from Modelling to Industrial Applications

Third Party Funds Group - Sub project

Overall project details

Overall project: A Synergetic Training Network on Energy beam Processing: from Modelling to Industrial Applications

Project Details

Project leader:
Prof. Dr. Lothar Frey

Contributing FAU Organisations:
Lehrstuhl für Elektronische Bauelemente

Funding source: EU - 7. RP / People / Initial Training Networks (ITN)
Acronym: STEEP
Start date: 15/01/2013
End date: 14/01/2017

Research Fields

Silicon Semiconductor Technology
Lehrstuhl für Elektronische Bauelemente

Abstract (technical / expert description):

The overall aim of the STEEP Initial Training Network is to establish a transnational research and training platform for the formation and career development of young researchers on energy beam (EB) processing methods - laser, abrasive waterjet machining and focused ion beam machining - which together represent a scientific field of critical importance for further advancement of European of high value-added manufacturing industry.


Whilst these processes differ in nature, a set of key commonalities can be identified among them when considered as dwell-time dependent processes; this allows the approach of EB processes under a unitary technology umbrella. The key element that brings all the EB processing methods together under the STEEP umbrella is a unifying modelling platform of the footprints, as a result of energy beam - workpiece interactions, followed by the development of an original beam path simulator.


Stage 1: Develop a generic modelling platform to predict the full 3D profile of footprints obtained as a result of the interaction between any energy beam and geometrically complex target surfaces.

Stage 2: Develop methods to calibrate the generic footprint models for various EB processing methods; validate the modelling approach on different EB processes.

Stage 3: Develop a beam path simulator that uses the modelled footprints to convolute full 3D surfaces; testing of the beam simulator will enable corrective actions to the EB parameters for error minimisation.

Stage 4: Implement the beam path simulator on real workstations to generate micro/meso/macro freeforms using three complementary energy beam processes (waterjet, laser, ion beam).

Among other tasks, the work at the Chair of Electron Devices (FAUEN) focused on two specific aspects of focused ion beam (FIB) processing and modelling: Detailed analysis and characterization of redeposited material during FIB sputtering of silicon and the determination of the current density profile of the ion beam tails by dedicated scanning spreading resistance microscopy (SSRM) measurements of FIB induced damage in silicon.

External Partners

University of Nottingham
University of Nice Sophia Antipolis / Université Nice Sophia Antipolis
The University of Liverpool
Katholieke Universiteit Leuven (KUL) / Catholic University of Leuven
Eidgenössische Materialprüfungs- und Forschungsanstalt (Empa) / Swiss Federal Laboratories for Materials Science & Technology
Fundacion Tekniker


Kaliya Perumal Veerapandian, S., Beuer, S., Rumler, M., Stumpf, F., Thomas, K., Pillatsch, L.,... Rommel, M. (2015). Comparison of silicon and 4H silicon carbide patterning using focused ion beams. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 365(365), 44-49. https://dx.doi.org/10.1016/j.nimb.2015.07.079

Last updated on 2018-06-11 at 17:46