PD Dr. Andreas Erdmann



Organisationseinheit


Technische Fakultät


Publikationen (Download BibTeX)


Pflaum, C., Rahimi, Z., & Erdmann, A. (2010). Characterization of the scattering effect of complex mask geometries with surface roughness. In Optical Modelling and Design (pp. 771709-771709-12). Brüssel.
Rahimi, Z., Erdmann, A., & Pflaum, C. (2009). Finite integration (FI) method for modelling optical waves in lithography masks. In Proceedings of International Conference of "Electromagnetics in Advanced Applications", 2009. ICEAA '09 (pp. 809-812). Turin.

Zuletzt aktualisiert 2017-22-12 um 04:50