Lehrstuhl für Elektronische Bauelemente

Address:
Cauerstraße 6
91058 Erlangen



Subordinate Organisational Units

Professur für Elektronische Bauelemente


Research Fields

Silicon Semiconductor Technology
Wide-Bandgap Devices
Anorganische Dünnschichtelektronik


Related Project(s)

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ERASE: Erforschung der Oberflächenpräparation und der Rückgewinnung von Aluminiumnitrid-Substraten
Dr. Elke Meißner
(01/03/2019 - 28/02/2022)


Emerging Talents: Herstellung und Charakterisierung von Heterostrukturen aus 2D Materialien
Dr.-Ing. Andreas Hutzler
(15/01/2019 - 14/01/2020)


FR 713/14-1: Atomic layer deposition of dopant source layers for semiconductor doping - Characterization and modelling of drive-in processes
Peter Pichler
(02/10/2017 - 30/09/2019)


Entwicklung eines PDMS-basierten Mikrofluidiksystems
Prof. Dr. Lothar Frey
(01/01/2017)


(SPP 1796: High Frequency Flexible Bendable Electronics for Wireless Communication Systems (FFLexCom)):
FFlexCom: Thin-Film Transistors with Novel Architecture for RF Circuits and Systems
Prof. Dr. Lothar Frey; Prof. Dr.-Ing. Robert Weigel
(01/06/2016 - 30/05/2019)



Publications (Download BibTeX)

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Gong, L., Bogen, S., Frey, L., Jung, W., & Ryssel, H. (1992). Simulation of high energy implantation profiles in crystalline silicon. Microelectronic Engineering, 5435146,, 495-498. https://dx.doi.org/10.1016/0167-9317(92)90482-7
Frey, L., Bogen, S., Gong, L., Jung, W., Ryssel, H., & Gyulai, J. (1992). High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 62(3), 410-415. https://dx.doi.org/10.1016/0168-583X(92)95267-U
Streckfusse, N., Frey, L., Zielonka, G., Kroninger, F., Ryzlewicz, C., & Ryssel, H. (1992). Analysis of trace metals on silicon surfaces. Fresenius Zeitschrift für Analytische Chemie, 343, 765-768. https://dx.doi.org/10.1007/BF00633562
Frey, L., Kroninger, F., Streckfusse, N., Ryssel, H., & Margail, J. (1992). Characterization of metal impurities in silicon-on-insulator material. Materials Science and Engineering B-Advanced Functional Solid-State Materials, 12, 195-198. https://dx.doi.org/10.1016/0921-5107(92)90285-H
Antos, L., Gyulai, J., Khanh, N., & Frey, L. (1992). End-of-range disorder influenced by inherent oxygen in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 71(4), 399-405. https://dx.doi.org/10.1016/0168-583X(92)95357-W
Oechsner, R., Kluge, A., Frey, L., & Ryssel, H. (1991). Tribological properties of carbonized photoresist. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 793-797. https://dx.doi.org/10.1016/0168-583X(91)95706-J
Gyulai, J., Frey, L., Ryssel, H., & Khanh, N. (1991). Effect of oxygen on the formation of end-of-range disorder in implantation amorphized silicon. Journal of Materials Research, 6(8), 1695-1700. https://dx.doi.org/10.1557/JMR.1991.1695


Publications in addition (Download BibTeX)


Stolzke, T., Dirnecker, T., Schwarz, J., & Frey, L. (2018). Investigation of magnetic properties from a manganese–zinc–ferrite polymer bonded material. International Journal of Applied Electromagnetics and Mechanics, Pre-press(Pre-press), 1-8. https://dx.doi.org/10.3233/JAE-171244

Last updated on 2019-24-04 at 10:18