Lehrstuhl für Elektronische Bauelemente

Address:
Cauerstraße 6
91058 Erlangen



Subordinate Organisational Units

Professur für Elektronische Bauelemente


Research Fields

Silicon Semiconductor Technology
Wide-Bandgap Devices
Anorganische Dünnschichtelektronik


Related Project(s)

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(Verbundprojekt: Keramische Aufbau- und Integrationstechnik für robuste Signal- und Leistungselektronik (KAIROS)):
KAIROS: Intelligentes Leistungsmodul
Prof. Dr. Lothar Frey
(01/08/2011 - 31/10/2014)


SiC-BIFET: Untersuchungen zu bipolaren SiC-Feldeffekttransistoren für das Mittelspannungsnetz
Prof. Dr. Lothar Frey
(01/09/2010 - 10/07/2017)


(Leistungswandler in GaN-Technologie zur Erschließung ungenutzter Energiepotentiale (PowerGaNplus)):
PowerGaNplus: Untersuchungen zur Leistungsdichte und Effizienz eines isolierenden DC/DC-Wandlers in GaN-Technologie
Prof. Dr. Lothar Frey
(01/06/2010 - 31/05/2013)


(The Bavarian Competence Network for Technical and Scientific High Performance Computing (KONWIHR)):
LightWave: LightWave: High Performance Computing of Optical Wave
Andreas Erdmann; Prof. Dr. Christoph Pflaum
(01/04/2009 - 31/03/2011)


(GRK 1161: Disperse systems for electronic applications):
GRK 1161: GRK 1161: Disperse systems for electronic applications - subproject electron devices in a nano-crystalline matrix
Prof. Dr. Lothar Frey; Dr. Michael Jank
(01/10/2005 - 30/09/2014)



Publications (Download BibTeX)

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Frey, L., Pichler, P., Kasko, I., Thies, I., Lipp, S., Streckfuss, N.,... Ryssel, H. (1994). Practical aspects of ion beam analysis of semiconductor structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 85, 356-362. https://dx.doi.org/10.1016/0168-583X(94)95844-0
Ryssel, H., Biró, L., Frey, L., Kuki, A., Kormány, T., Serfozo, G., & Khanh, N. (1994). Athermal effects in ion implanted layers.
Gong, L., Bogen, S., Frey, L., Jung, W., & Ryssel, H. (1994). Analytical description of high energy implantation profiles of boron and phosphorus into crystalline silicon. Radiation Effects and Defects in Solids, 127, 385-395. https://dx.doi.org/10.1080/10420159408221046
Biró, L., Gyulai, J., Ryssel, H., Frey, L., Kormány, T., Tuan, N., & Horváth, z. (1993). Photon assisted implantation (PAI). Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 80-81 Part. 1, 607-611. https://dx.doi.org/10.1016/0168-583X(93)96191-E
Bogen, S., Gong, L., Frey, L., & Ryssel, H. (1993). High energy implantation of 10B and 11B into (100) silicon in channel and in random direction. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 659-662. https://dx.doi.org/10.1016/0168-583X(93)96203-O
Kasko, I., Dehm, C., Frey, L., & Ryssel, H. (1993). Effect of ion-beam mixing temperature on cobalt silicide formation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 786-789. https://dx.doi.org/10.1016/0168-583X(93)90682-V
Frey, L., Ergele, W., Falter, T., Gong, L., & Ryssel, H. (1993). Analysis of microstructured samples by focused ion beam sample preparation. Microelectronic Engineering, 21, 375-378. https://dx.doi.org/10.1016/0167-9317(93)90095-M
Gong, L., Frey, L., Bogen, S., & Ryssel, H. (1993). A novel delineation technique for 2D-profiling of dopants in crystalline silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74, 186-190. https://dx.doi.org/10.1016/0168-583X(93)95040-C
Kroninger, F., Streckfuss, N., Frey, L., Falter, T., Ryzlewicz, C., Pfitzner, L., & Ryssel, H. (1993). Application of advanced contamination analysis for qualification of wafer handling systems and chucks. Applied Surface Science, 63, 93-98. https://dx.doi.org/10.1016/0169-4332(93)90070-R
Ryssel, H., Frey, L., Streckfuss, N., Schork, R., Kroninger, F., & Falter, T. (1993). Contamination control and ultrasensitive chemical analysis. Applied Surface Science, 63, 79-87. https://dx.doi.org/10.1016/0169-4332(93)90068-M
Streckfusse, N., Frey, L., Zielonka, G., Kroninger, F., Ryzlewicz, C., & Ryssel, H. (1992). Analysis of trace metals on silicon surfaces. Fresenius Zeitschrift für Analytische Chemie, 343, 765-768. https://dx.doi.org/10.1007/BF00633562
Antos, L., Gyulai, J., Khanh, N., & Frey, L. (1992). End-of-range disorder influenced by inherent oxygen in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 71(4), 399-405. https://dx.doi.org/10.1016/0168-583X(92)95357-W
Frey, L., Bogen, S., Gong, L., Jung, W., Ryssel, H., & Gyulai, J. (1992). High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 62(3), 410-415. https://dx.doi.org/10.1016/0168-583X(92)95267-U
Gong, L., Bogen, S., Frey, L., Jung, W., & Ryssel, H. (1992). Simulation of high energy implantation profiles in crystalline silicon. Microelectronic Engineering, 5435146,, 495-498. https://dx.doi.org/10.1016/0167-9317(92)90482-7
Frey, L., Kroninger, F., Streckfusse, N., Ryssel, H., & Margail, J. (1992). Characterization of metal impurities in silicon-on-insulator material. Materials Science and Engineering B-Advanced Functional Solid-State Materials, 12, 195-198. https://dx.doi.org/10.1016/0921-5107(92)90285-H
Oechsner, R., Kluge, A., Frey, L., & Ryssel, H. (1991). Tribological properties of carbonized photoresist. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 793-797. https://dx.doi.org/10.1016/0168-583X(91)95706-J
Gyulai, J., Frey, L., Ryssel, H., & Khanh, N. (1991). Effect of oxygen on the formation of end-of-range disorder in implantation amorphized silicon. Journal of Materials Research, 6(8), 1695-1700. https://dx.doi.org/10.1557/JMR.1991.1695


Publications in addition (Download BibTeX)


Stolzke, T., Dirnecker, T., Schwarz, J., & Frey, L. (2018). Investigation of magnetic properties from a manganese–zinc–ferrite polymer bonded material. International Journal of Applied Electromagnetics and Mechanics, Pre-press(Pre-press), 1-8. https://dx.doi.org/10.3233/JAE-171244

Last updated on 2019-24-04 at 10:18