Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures - Späth, Andreas; Vollnhals, Florian; TU, Fan; Prince, Kevin C.; Richter, Robert; Raabe, Jörg; Marbach, Hubertus; Fink, Rainer H. (Microscopy and Microanalysis, 2018)