New method based on atomic force microscopy for in-depth characterization of damage in Si irraadiate with 209 MeV Kr - Biró, L.; Gyulai, Jozsef; Havancsák, K.; Didyk, A.; Bogen, S.; Frey, Lothar; Ryssel, Heiner (Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997)