Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium - Maier, Reinhard; Haeublein, Volker; Ryssel, Heiner; Völlm, H.; Feili, D.; Seidel, H.; Frey, Lothar (19th International Conference on Ion Implantation Technology 2012, IIT 2012, 2012)
Keywords: alkali; cesium; amorphous; redistribution; ion implantation; solid-phase epitaxy; rubidium