Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors - Lemberger, Martin; Paskaleva, Albena; Zürcher, Stefan; Bauer, Anton; Frey, Lothar; Ryssel, Heiner (Microelectronic Engineering, 2004)
Keywords: High-k dielectrics; MOCVD; Zirconium silicate