Modeling of the Diffusion and Activation of Arsenic in Silicon Including Clustering and Precipitation - Martinez Limia, Alberto; Pichler, Peter; Steen, Christian; Paul, Silke; Lerch, Wilfried (Gettering and Defect Engineering in Semiconductor Technology XII, 2008)
UnivIS-Import:2017-07-10:Pub.2008.tech.IE.LEB.modeli
Keywords: Arsenic clustering; Arsenic deactivation; Arsenic diffusion; Arsenic precipitation; Arsenic segregation; Flash annealing; Silicon; Spike annealing